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Industrial Automatic Control Systems and Controllers

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Electrode structure of a micromechanical gyroscope
T.G. NESTERENKO, M.V. PERESVETOV, A.N. KOLEDA, V.A. KOLCHUZHIN

The article deals with the electrode structures used in the micromechanical gyroscope as the sensitive, actuator, tuning, and control elements. The analytical modeling of capacitances of electrode structures and generated electrostatic forces taking into account the fringing field effects are performed.
Keywords: micromechanical gyroscope, capacitance, electrostatic forces, comb electrode structure, fringing field effect.

Contacts: e-mail: nester4646@mail.ru

Pp. 62-66.

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