Industrial Automatic Control Systems and Controllers Annotation << Back Modeling Influence of Technological Defects on the Characteristics of the Springing Elements of Microelectromechanical Systems Nesterenko T.G. Barbin E.S. Koleda A.N. In the paper considered springing elements of microelectromechanical systems (MEMS). The influence analysis of technological imperfections of MEMS manufacturing on the characteristics springing elements was presented. By means of computer-aided design parametric 3D-model of the springing elements were created. Using the finite element method the mode shapes torsions of different designs were defined. The parameters which have the greatest impact on the eigenfrequencies and stiffness coefficients of springing elements MEMS were defined. Keywords: microelectromechanical systems; eigenfrequences; coefficients of stiffnesses; springing elements; technological defects. Contacts: E-mail: bar_es@mail.ru Pp. 60-66.