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Industrial Automatic Control Systems and Controllers

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Structural-parametric Models of Electromagnetoelastic Actuators for Nano- and Micromanipulators
S.M. Afonin

Structural-parametric models, parametric structural schematic diagrams, transfer functions of electromagnetoelastic actuators for nano- and micromanipulators are obtained. For decision wave equation the general structural-parametric model and the general parametric structural schematic diagram of electromagnetoelastic actuators are determined. The matrix deformation equation and transfer function of electromagnetoelastic actuators are derived from the system of equations describing the structural-parametric model. Application of the piezoactuators for nano- and micromanipulators is promising for nanotechnologies, nanobiology, photonics, power engineering, microelectronics and astronomy for precision compensation for the temperature and gravitational deformations, photonics, power engineering, microelectronics and astronomy for precision alignment, compensation of thermal and gravitational deformations. The piezoactuator is in the range of displacement for nano- and micromanipulators to several micrometers provides nanometric accuracy of the control system. Investigated static and dynamic characteristics of the piezoactuators. Determined transfer functions of the piezoactuators with elastic-inertia load including the load mass, the rigiditys of the elastic element and of the piezoactuator.
Keywords: structural-parametric model; parametric structural schematic diagram; transfer function; electromagnetoelastic actuator; piezoactuator; deformation; nano- and microdisplacement.

Contacts: E-mail: eduems@mail.ru

Pp. 23-30.

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