Industrial Automatic Control Systems and Controllers Annotation << Back Temperature Regime of the Air Supply Network of the Air Removal System of Clean Rooms M.A. Gundartsev, A.S. Ryabyshenkov, V.I. Karakeyan The possibility of an analytical determination of the regularities of the change in air temperature in the system of its removal from a clean room of microelectronics is investigated. As the basis of the solution, the heat balance equation for the elementary segment of the air duct is used with diff erent techniques for cleaning emissions. Analytical dependences of the temperature of the exhaust air at the outlet to the environment determining the value of the thermomechanical exergy of the release and its potential environmental hazard are obtained. Formulas are proposed for the preliminary determination of the total length of the duct or its sections before installation with their external installation. Keywords: air removal system; thermomechanical exergy; discharge temperature; purification technique; air duct length; external gasket. DOI: 10.25791/asu.10.2020.1223 Pp. 12-16.