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Industrial Automatic Control Systems and Controllers

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Review of Manufacture Methods and Construction Analysis of High Temperature Semiconductor Silicon Carbide Pressure Sensors
Barinov I.N.

The constructive-technological problems, trends and development conditions of the high temperature semiconductor silicon carbide pressure sensors are viewed. Keywords: silicon carbide, high temperature pressure sensor, fabrication technique, sensor element E-mail: mzungu@inbox.ru. Pp. 25-36

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