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Industrial Automatic Control Systems and Controllers

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Filters on the Surface Acoustic Waves, Sensor Physical Values on Their Base andMeasure of the Small Length (to 5 ?m) Made on “Plant Etalon” Omsk
BUDKO D.A.

Results on the work “Plant Etalon” Omsk are presented in article in the fi eld of development and fabrications to product of microelectronics (the SAW fi lters, element for measurement of the small distances to 5 ?m and inaccuracy to qualifi cations 0,05 ?m). It is shown possibility using designed line of the delay for making sensor temperature and sensor of the pressure. Keywords: SAW fi lters, stage micrometer, line grating, measure of coincidence. E-mail: bdenis13@mail.ru

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