Industrial Automatic Control Systems and Controllers Annotation << Back Solving the Wave Equation for Electromagnetic Actuator Control Tasks in Micro- and Nanomanipulators Afonin S.M. A generalized structural-parametric model of an electromagnetic actuator is derived from a wave equation; actuator’s transfer functions are obtained, and piezoactuator’s dynamic responses are calculated for micro- and nanomanipulators. The generalized magnetoelasticity equation is used for deriving the responses of precision electromechanical actuators based on piezoelectric, piezomagnetic, electrostrictive and magnetostrictive effects. A set of equations describing the generalized structural-parametric model of a nano- and micro-displacement actuator is derived from the wave equation’s solution for electromagnetoelastic actuators. Actuator’s transfer functions are derived from the generalized structural-parametric electromagnetoelastic actuator model. The responses obtained enable the selection of actuator parameters dependent on the external load. A piezoactuator based on the inverse piezoelectric effect with 10 nm/V sensitivity and displacement range from several nanometers up to tens of microns ensuring high load capacity of about 1000 N is identified as the most promising actuator for nano- and micro-displacements. Piezoactuator’s characteristic frequency equation is derived, its resonant frequency change under elastic-inertial loading is investigated. Keywords: electromagnetoelastic actuator, piezoactuator, micro- and nanomanipulators, wave equation’s solution, structural-parametric model, dynamic responses. Contacts: E-mail: eduems@mail.ru Pp. 22-28.