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Industrial Automatic Control Systems and Controllers

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Correctors for Automatic Deformation Control Systems of Multilayer Piezo Actuators of Nano and Microdisplacements
Afonin S.M.

Transfer functions for multilayer piezoactuators of nano and microdisplacements at longitudinal and transverse piezoelectric effects are derived; piezo actuator’s characteristics are corrected using an embedded piezosensor. Application of piezo actuators of nano and microdisplacements looks promising in nanotechnology, nanobiology, photonics, power industry, microelectronics and astronomy for precise alignment and compensation of temperature and gravitational deformations. Increasing piezodrive’s travel range up to dozens micrometers can be attained by using a multilayer piezo actuator, which ensures control system’s nanometer order. Transfer functions are derived under elastic inertial load taking into account the load mass and the rigidity of the resilient member and piezo actuator. To ensure control performance of multilayer piezo actuator deformation and the desirable index of oscillation, correctors for control systems are selected. Absolute stability conditions for such control systems are determined.

Keywords: multilayer piezo actuator, nano and microdisplacements, correction of characteristics, transfer functions, correctors, control system stability.

Contacts: E-mail: eduems@mail.ru

Pp. 17-25.

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