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Industrial Automatic Control Systems and Controllers

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Coeffi cients of Harmonious Linearization of Hysteresis Characteristics of Multilayer Piezoactuator Nanoand Micrometric Movement
S.M. Afonin

Coeffi cients of harmonious linearization are received for loop characteristics of piezoeffect for calculation a systems of automatic control of the multilayer piezoactuators nano- and micrometric movement. Increase range of motion to hundreds of micrometers is achieved by using a multilayered piezoactuator, which is one of the most promising nano- and microdisplacement electromagnetoelasticity actuators that provide nanometer precision. The use of multilayer piezoactuator for nano-and microdisplacement is a promising for nanotechnology, nanobiology, photonics, energy, and astronomy, microelectronics for precise alignment, compensation of temperature and gravitational deformation. Hysteresis loop characteristics of the multilayer piezoactuators are proposed. Basic and local loops for hysteresis characteristics of the multilayer piezoactuators are proposed. Transfer functions of a nonlinear links with a loop characteristic
are found for the multilayer piezoactuators of longitudinal, transverse and shear piezoeffect.
Keywords: multilayer piezoactuator; control systems; deformation; hysteresis loop characteristics; coeffi cients of harmonious
linearization; transfer functions; nano- and microdisplacements; basic and local loops.

Contacts: E-mail: eduems@mail.ru

Pp. 59-65.

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