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Industrial Automatic Control Systems and Controllers

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Transformation of Parametric Structural Schemes of Multilayer Piezoactuator with Transverse Piezoelectric Effect for Nanomechatronics Systems
S.M. Afonin

In the work the parametric structural schemes, the structural-parametric model and the transfer functions of the multilayer piezoactuator with the transverse piezoelectric effect for the nanomechatronics systems are defined. The transformation of the parametric structural diagrams is shown. With the transverse piezoelectric effect the multilayer piezo actuator is used to combine, compensate for the temperature and gravitational deformations in the nanotechnology, the nanobiology, the adaptive optics, for scanning in the atomic force microscopes and the scanning tunneling microscopes. The structural-parametric model and the parametric block diagram of the multilayer piezoactuator with the transverse piezoelectric effect based on the piezoelectric effect equations, the wave equation, the Laplace transform, and the back electromotive force equation are obtained. The matrix equation of the deformations and the transfer functions of the multilayer piezoactuator are obtained from the system of the equations describing its structural-parametric model. The change in the elastic compliance and the rigidity of the multilayer piezoactuator with the transverse piezoelectric effect depending on the type of control by voltage or current is determined. The influence of the geometrical and physical parameters, the external load on its static and dynamic characteristics is investigated. The matrix transfer function of the multilayer piezoactuator with the transverse piezoelectric effect is obtained. The transfer functions of the multilayer piezo actuator fixed by one end are determined under the elastic inertial load taking into account the mass of the load, the stiffnesses of the elastic element and the multilayer piezo actuator.
Keywords: multilayer piezoactuator; nanomechatronics system; deformation; transverse piezoelectric effect; parametric structural diagram; structural-parametric model; transfer function.


DOI: 10.25791/asu.06.2019.682

Contacts: E-mail: eduems@mail.ru

Pp. 54-63.

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